High-Resolution Patterning of Various Large-Area, Highly Ordered Structural Motifs by Directional Photofluidization Lithography: Sub-30-nm Line, Ellipsoid, Rectangle, and Circle Arrays
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Title
High-Resolution Patterning of Various Large-Area, Highly Ordered Structural Motifs by Directional Photofluidization Lithography: Sub-30-nm Line, Ellipsoid, Rectangle, and Circle Arrays
Authors
Keywords
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Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 21, Issue 10, Pages 1770-1778
Publisher
Wiley
Online
2011-03-15
DOI
10.1002/adfm.201001927
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