Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon
出版年份 2011 全文链接
标题
Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 23, Issue 36, Pages 4174-4177
出版商
Wiley
发表日期
2011-08-08
DOI
10.1002/adma.201101888
参考文献
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