Soft lithography for micro- and nanoscale patterning

Published 2010 View Full Article

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Title
Soft lithography for micro- and nanoscale patterning
Authors
Keywords
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Journal
Nature Protocols
Volume 5, Issue 3, Pages 491-502
Publisher
Springer Nature
Online
2010-02-19
DOI
10.1038/nprot.2009.234
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