Article
Engineering, Electrical & Electronic
Ruzhen Xu, Tianfeng Zhou, Rebecca Cheung
Summary: In this study, a novel method is proposed to fabricate concave MLAs on SiC substrates by using self-assembled silica microspheres as a template. This method overcomes the manufacturing challenges posed by the high hardness and brittleness of SiC.
MICROELECTRONIC ENGINEERING
(2021)
Article
Engineering, Mechanical
Shuo Zhang, Yunze Qi, Junyun Chen
Summary: In this work, a novel machining method named oblique diamond cutting is used to improve the brittle-ductile transition behavior of 6H-SiC. The tool edge ovalization effect is proposed to provide insight into the change in cutting edge shape. Experimental results and finite element simulation indicate that oblique diamond cutting significantly increases the brittle-ductile transition depth.
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
(2023)
Article
Chemistry, Analytical
Quanquan Sun, Jiaxuan Tang, Lifeng Shen, Jie Lan, Zhenfeng Shen, Junfeng Xiao, Xiao Chen, Jianguo Zhang, Yu Wu, Jianfeng Xu, Xuefang Wang
Summary: This paper proposes a high-precision, low-cost method for processing spherical microlens arrays using a nanoimprint technique. By fabricating a nanoimprint mold with high surface precision and low surface roughness, and performing anti-sticking treatment on the mold, the microstructure of the microlens array was successfully transferred to a silicon substrate.
Article
Chemistry, Physical
Qiufa Luo, Jing Lu, Zige Tian, Feng Jiang
Summary: In this study, the interaction between diamond abrasives and the 6H-SiC wafer surface during ultra-precision polishing was analyzed through experiments and molecular dynamics simulations. It was found that controlling material removal uniformity and restricting abrasive cutting depth to tens of nanometers or less can achieve a smooth, scratch-free and almost damage-free wafer surface. These findings provide insights into the importance of controlling material removal uniformity in nanoscale manufacturing processes.
APPLIED SURFACE SCIENCE
(2021)
Article
Materials Science, Ceramics
Lukang Wang, You Zhao, Zixuan Yang, Yulong Zhao, Xinwan Yang, Taobo Gong, Cun Li
Summary: Utilizing a Yb:KGW femtosecond laser to fabricate 4H-SiC sensor membranes has shown potential in achieving high size accuracy and steep sidewalls, with wet cleaning and ICP etching playing a significant role in improving membrane surface morphology. Energy-Dispersive X-ray Spectroscopy and Raman spectrum analysis confirmed that the crystal properties of the membrane bottom and thin epitaxial layers on the front side were not damaged by the micromachining process.
CERAMICS INTERNATIONAL
(2021)
Article
Optics
Yan Liang, Tianfei Zhu, Mengjia Xi, Haris Naeem Abbasi, Jiao Fu, Rui Su, Zhiqiang Song, Hongxing Wang, Kaiyue Wang
Summary: An ultra-smooth diamond concave microlens array was fabricated using a chemical reflow process assisted by dry etching technique, showing high-quality imaging and focusing performance, and achieving laser beam homogenization.
OPTICS AND LASER TECHNOLOGY
(2021)
Article
Engineering, Industrial
Jiankai Jiang, Tong Luo, Guoqing Zhang, Yuqi Dai
Summary: A novel offset-fly-cutting-servo (OFCS) machining system was developed for fabricating straight-groove-type micro structure arrays without the Y-axis, showing effective results with well-matched morphology between machined and designed arrays. The mathematical model, machining scheme, and cutting experiments provided theoretical reference for complex micro structure arrays machining.
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
(2021)
Article
Engineering, Manufacturing
Yi Zhang, Linfeng Zhang, Keyu Chen, Dianzi Liu, Dong Lu, Hui Deng
Summary: This method proposes a rapid detection of subsurface damage (SSD) of SiC using atmospheric inductivity coupled plasma, optimizing detection through plasma diagnosis and simulation and confirming accuracy with STEM analysis. Rapid screening ability for SSD is demonstrated, making it a promising approach for rapid detection.
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING
(2021)
Article
Chemistry, Physical
Shuo Zhang, Xiao Cheng, Junyun Chen
Summary: Compared with conventional orthogonal cutting, this study systematically investigates the oblique nano-cutting of 6H-SiC by tilting the tool at different angles through molecular dynamics simulations. The deformation mechanism, surface deformation, and cutting force variation are studied, and the transition path of amorphization is clarified. Dislocation analysis reveals that basal dislocation systems dominate the behavior, while in oblique nano-cutting, the basal 1/3 < 1 (1) over bar 00> Shockley partial dislocation of 6H-SiC is more activated due to the inclined-cutting-edge-derived shear stress.
APPLIED SURFACE SCIENCE
(2022)
Article
Materials Science, Multidisciplinary
Jianguo Zhang, Yufan Fu, Yongjing Yu, Xiao Chen, Junjie Zhang, Junfeng Xiao, Jianfeng Xu
Summary: In this research, in-situ laser-assisted diamond cutting was used to precisely machine RB-SiC. Raman spectroscopy was employed to identify 3C-SiC and 6H-SiC components in RB-SiC. The study revealed that cross slips and high-density stacking faults significantly enhance the plastic deformation of RB-SiC, and the dislocations at the 3C-SiC/6H-SiC interfaces result in lateral cracks propagating along the [111]//[0001] direction.
Article
Engineering, Multidisciplinary
Senbin Xia, Ziqiang Yin, Jianwen Zhang, Songtao Meng, Yawen Guo, Chen Huang
Summary: This paper introduces a new machining method called Diamond Shifting Cutting (DSC) for fabricating Hexagonal cube corner retroreflectors (HCCRs) and conducts cutting experiments. The experimental results show that this method can effectively produce HCCRs with high precision.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2023)
Article
Engineering, Manufacturing
Jia Zhou, Tianfeng Zhou, Tianxing Wang, Benshuai Ruan, Wenxiang Zhao, Xibin Wang
Summary: In this paper, a novel tool swing cutting (TSC) method is proposed to efficiently fabricate micro-spherical lens arrays (MSLAs), and its tool setting technique is introduced. The principle of TSC is analyzed, and the relationships between the tool parameters and machining structure are determined. The experimental results of an MSLA machined based on the proposed TSC method demonstrate good machining quality with a form error of <354 nm and a surface roughness of <3.74 nm.
JOURNAL OF MANUFACTURING PROCESSES
(2023)
Article
Materials Science, Multidisciplinary
Yan Liang, Tianfei Zhu, Xinling Du, Jinliang Xu, Shuwei Fan, Hongxing Wang
Summary: A microlens array on a diamond for Shack Hartmann sensor was successfully fabricated using thermal reflow and dry etch technique. The diamond microlens array exhibited good uniformity, surface smoothness, and had the potential to work under harsh conditions.
DIAMOND AND RELATED MATERIALS
(2022)
Article
Materials Science, Multidisciplinary
Shuo Sun, Feng Xu, Lili Shi, Shengji Zhou, Yanchao Zhao, Chengzuan Gao, Dunwen Zuo
Summary: This paper prepares two types of diamond cone array tools (DCATs) for precision processing by etching free-standing diamond (FSD) and microcrystalline diamond (MCD) films using double-bias assisted hot filament chemical vapor deposition (HFCVD). The performance of the newly developed free-standing diamond cone array tool (FSD-CAT) and microcrystalline diamond cone array tool (MCD-CAT) is evaluated by performing lapping experiments on monocrystalline silicon. The results show that DCATs can effectively reduce the surface roughness of silicon, with a surface roughness as low as 5 nm achieved by using a combination of both DCATs.
MATERIALS TODAY COMMUNICATIONS
(2022)
Article
Chemistry, Analytical
Bao-Xu Wang, Jia-Xin Zheng, Jin-Yong Qi, Ming-Rui Guo, Bing-Rong Gao, Xue-Qing Liu
Summary: Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems with significant applications in modern optics. This study proposes a femtosecond-laser-assisted dry etching technology for fabricating silicon microlenses, where the size of the microlens can be controlled by the laser pulse energy and number of pulses. The integration of multifocal microlens arrays into a silicon microcantilever using this method broadens the application scope of MOEMSs in three-dimensional imaging systems.
Article
Engineering, Multidisciplinary
Junichi Kouguchi, Hayato Yoshioka
Summary: A new monitoring method for milling process using signal analysis of acceleration sensors is proposed in this research, which can solve the difficulty in estimating cutting forces for small diameter tools.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Weijie Wang, Yanling Tian, Zhao Zhang, Zhilai Lu, Fujun Wang, Dawei Zhang
Summary: This paper proposes a comprehensive model for predicting the cutting depth and contact area in nanoscratching. The model takes into account the geometric shape of the indenter and elastic recovery, reducing prediction errors. The study also analyzes the influence of the indenter geometry on the contact area, with the face angle of the pyramid identified as a key factor.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Qiaolin Li, Yuki Shimizu, Xiaohao Wang, Xinghui Li, Wei Gao
Summary: This paper introduces a stitching linear scan method for roundness and diameter measurement of small cylinders, using a ruby ball stylus as hardware filtering to eliminate the influence of high-frequency data. Experimental results show that the repeatability of the ruby ball stylus is better than the diamond stylus.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Chaturaporn Kerdkaew, Surasak Kaewpho, Sakchai Chomkokard, Theera Yaemglin, Ittipon Cheowanish, Noparit Jinuntuya, Wiwat Wongkokua
Summary: A new calibration standard for a CMOS-based autocollimator using an optical angle generator with a submillimeter strip reflector (OAG-SSR) is proposed. This method provides angular values along the measuring range of the autocollimator without any mechanical movement, enabling a faster calibration process, which is suitable for integration with production lines.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Haohao Tao, Tongjie Li, Feng Chen, Jinwei Fan, Ri Pan
Summary: In this paper, a novel OTA method is proposed that considers the relationship between tolerance of machine tools' key parts and volumetric error. A volumetric error prediction model is established based on the bridge between geometric error and tolerance. Additionally, a Processing Simplicity Index (PSI) is introduced to replace manufacturing cost and a tolerance-PSI model is established. An OTA model is formulated to minimize volumetric error and maximize PSI. The feasibility and effectiveness of the method are validated through simulations and experiments.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Xiumin Zhang, Jianhua Liu, Huanxiong Xia, Xiaohui Ao, Jiechen Zhou, Zhihao Fu
Summary: A comprehensive finite-element model was developed in this paper to study the evolution of surface figure in high-precision bonded mirrors. The cure kinetics and mechanical behaviors of the optical adhesive were experimentally examined and modeled, and the effects of environmental factors on the surface-figure accuracy and stability were further investigated.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Peng Wang, Bin Chen, Jian Li, Jianwei Wang, Yingjie Zhang, Kai Feng
Summary: This paper proposes an aerostatic bearing with damper modules to suppress vibration on the bearing surface. The stiffness and damping characteristics can be adjusted by changing the thickness of the sheets, resulting in effective vibration suppression.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Lei Yang, Xiaoguang Guo, Renke Kang, Xianglong Zhu, Yufan Jia, Hao Wang
Summary: This paper develops an analytical model that takes into account the pad surface morphology to predict the evolution of the workpiece surface shape. The model considers the cross-scale relationship between the formation of lapped surface shape and the scratching process of a single abrasive grain. The simulated and experimental results validate the correctness and validity of the model, providing new ideas for controlling the workpiece surface.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Gabriele Piscopo, Alessandro Salmi, Eleonora Atzeni
Summary: This paper proposes an artifact for the LP-DED process and evaluates its dimensional accuracy and geometrical tolerances. The findings show that the tolerances of the LP-DED process are comparable to sand casting, lower than LB-PBF technologies, but similar to EB-PBF technologies.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Liang Xue, Ningsong Qu
Summary: This study focuses on the key issues of improving material removal rate and surface quality in macro-electrolyte jet machining. By introducing a novel tool with the rear-end tilted, the current density of the workpiece surface can be increased, leading to improved machining performance. Experimental results show that the tool with a rear-end tilt angle of 15 degrees significantly enhances the material removal rate and reduces surface roughness compared to the standard tool.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Ping Yang, Kaixin Luo, Runxi Wu
Summary: This article proposes a new calibration device to measure the spatial errors of a six-axis serial robot. The device compensates for errors by modifying angles and identifying stiffness parameters, and experiments verify its effectiveness.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Shilei Wu, Mingxiang Ling, Yingbin Wang, Tao Huang
Summary: This paper studies the electromechanical behavior of elliptical APAs by analyzing the multi-domain dynamics of piezoelectric stacks and compliant mechanisms using a novel electro-mechanical transfer matrix method. An analytical electro-elasto transfer matrix of piezoelectric stacks operating at the d33 mode is derived in the form of Taylor's series. The dynamic response spectrum of displacement and impedance for elliptical APAs is accurately captured by this electro-mechanical model, and different topologies of elliptical APAs are compared to suggest the optimal configuration.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Lei Meng, Yusheng Liu, Ying Yan, Dongming Guo, Ping Zhou
Summary: This study explores electrochemically induced chemical etching (ECICE) as a method to achieve nanogram-level, low-cost, stress-free, and stable material removal of fused quartz. The key factors affecting removal minimum and stability are revealed through modeling analysis and testing. A proposed method achieves precision stable removal with satisfactory results at the nanogram level.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Hong Yao, Hai Bi, Junjie Wei, Shuo Zhan, Fangxin Chen, IEEE
Summary: This paper presents a dual-loop control syringe-based picoliter-scale injection system for high-precision microinjection. The system utilizes an inner pneumatic servo loop and an outer position servo loop to achieve precise control. The experimental results demonstrate that the system can regulate the smallest droplet size to within 0.25 pL.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)
Article
Engineering, Multidisciplinary
Jinchun Yuan, Jiasheng Li, Ye Ding
Summary: In this paper, a simple and effective internal model control (IMC) system is proposed to attenuate thrust ripples in ultraprecision air-bearing linear feed systems, based on a modified modeling and identification method of permanent magnet linear synchronous motors (PMLSMs). The performance of the proposed method in overcoming nonlinearity and achieving smooth velocities in steady states is demonstrated through analysis and experiments.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2024)