Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
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Title
Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 16, Pages 165104
Publisher
AIP Publishing
Online
2018-04-25
DOI
10.1063/1.5012883
References
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