Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
出版年份 2018 全文链接
标题
Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
作者
关键词
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出版物
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 16, Pages 165104
出版商
AIP Publishing
发表日期
2018-04-25
DOI
10.1063/1.5012883
参考文献
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