Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering

标题
Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 16, Pages 165104
出版商
AIP Publishing
发表日期
2018-04-25
DOI
10.1063/1.5012883

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