Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets

Published 2010 View Full Article

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Title
Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 14, Pages 4601-4605
Publisher
Elsevier BV
Online
2010-02-26
DOI
10.1016/j.apsusc.2010.02.057

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