Ferroelectricity in epitaxial Y-doped HfO2 thin film integrated on Si substrate

Title
Ferroelectricity in epitaxial Y-doped HfO2 thin film integrated on Si substrate
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 20, Pages 202901
Publisher
AIP Publishing
Online
2018-05-14
DOI
10.1063/1.5020688

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