Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD

Published 2017 View Full Article

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Title
Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
Authors
Keywords
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Journal
Advanced Materials Interfaces
Volume 4, Issue 18, Pages 1700274
Publisher
Wiley
Online
2017-05-31
DOI
10.1002/admi.201700274
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