A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films

Title
A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films
Authors
Keywords
-
Journal
Micromachines
Volume 8, Issue 4, Pages 116
Publisher
MDPI AG
Online
2017-04-05
DOI
10.3390/mi8040116

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