Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

Title
Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 12, Pages J419
Publisher
The Electrochemical Society
Online
2010-10-17
DOI
10.1149/1.3496003

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