Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Published 2010 View Full Article

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Title
Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 147, Issue 2, Pages 381-384
Publisher
Elsevier BV
Online
2010-04-17
DOI
10.1016/j.snb.2010.04.012

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