MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
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Title
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 5, Issue 47, Pages 12635-12644
Publisher
Royal Society of Chemistry (RSC)
Online
2017-11-29
DOI
10.1039/c7tc03958a
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