MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
出版年份 2017 全文链接
标题
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
作者
关键词
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出版物
Journal of Materials Chemistry C
Volume 5, Issue 47, Pages 12635-12644
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-11-29
DOI
10.1039/c7tc03958a
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