Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials

Published 2017 View Full Article

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Title
Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials
Authors
Keywords
Plasma jet, Atmospheric pressure non-equilibrium plasma, Surface processing, Plasma treatment, Plasma-assisted deposition, Plasma etching
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 322, Issue -, Pages 174-201
Publisher
Elsevier BV
Online
2017-05-13
DOI
10.1016/j.surfcoat.2017.05.027

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