Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials

出版年份 2017 全文链接

标题

作者

关键词

Plasma jet, Atmospheric pressure non-equilibrium plasma, Surface processing, Plasma treatment, Plasma-assisted deposition, Plasma etching

出版物

Volume 322, Issue -, Pages 174-201

出版商

Elsevier BV

发表日期

2017-05-13

DOI

10.1016/j.surfcoat.2017.05.027

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