Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings

Published 2017 View Full Article

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Title
Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings
Authors
Keywords
CrAlSiN, x, CrAlSiO, y, N, x, Optical properties, Hardness, Chemical structure
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 328, Issue -, Pages 134-141
Publisher
Elsevier BV
Online
2017-08-16
DOI
10.1016/j.surfcoat.2017.08.038

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