Conformal deposition of lithium phosphate thin film electrolytes for 3D solid state batteries by MOCVD

Published 2017 View Full Article

Authors

Keywords

Lithium phosphate, All-solid-state-batteries, MOCVD, Solid state electrolyte, Conformal deposition

Journal

SOLID STATE IONICS

Volume 313, Issue -, Pages 14-21

Publisher

Elsevier BV

Online

2017-11-11

DOI

10.1016/j.ssi.2017.10.022

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