Conformal deposition of lithium phosphate thin film electrolytes for 3D solid state batteries by MOCVD

标题
Conformal deposition of lithium phosphate thin film electrolytes for 3D solid state batteries by MOCVD
作者
关键词
Lithium phosphate, All-solid-state-batteries, MOCVD, Solid state electrolyte, Conformal deposition
出版物
SOLID STATE IONICS
Volume 313, Issue -, Pages 14-21
出版商
Elsevier BV
发表日期
2017-11-11
DOI
10.1016/j.ssi.2017.10.022

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