A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball
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Title
A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 88, Issue 11, Pages 115109
Publisher
AIP Publishing
Online
2017-11-15
DOI
10.1063/1.4994906
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