A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball
出版年份 2017 全文链接
标题
A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 88, Issue 11, Pages 115109
出版商
AIP Publishing
发表日期
2017-11-15
DOI
10.1063/1.4994906
参考文献
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