Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films
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Title
Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films
Authors
Keywords
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Journal
PLASMA PHYSICS REPORTS
Volume 43, Issue 8, Pages 844-857
Publisher
Pleiades Publishing Ltd
Online
2017-10-25
DOI
10.1134/s1063780x17080098
References
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