Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films

标题
Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films
作者
关键词
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出版物
PLASMA PHYSICS REPORTS
Volume 43, Issue 8, Pages 844-857
出版商
Pleiades Publishing Ltd
发表日期
2017-10-25
DOI
10.1134/s1063780x17080098

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