Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP

External control of electron energy distributions in a dual tandem inductively coupled plasma

(2015) Lei Liu et al.   JOURNAL OF APPLIED PHYSICS

Ignition delay of a pulsed inductively coupled plasma (ICP) in tandem with an auxiliary ICP

(2015) Lei Liu et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing

(2015) Hyo-Chang Lee et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

(2014) Hyo-Chang Lee et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas

(2012) Min-Hyong Lee et al.   JOURNAL OF APPLIED PHYSICS

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

(2010) Hyo-Chang Lee et al.   PHYSICS OF PLASMAS

Radio frequency-compensated Langmuir probe with auxiliary double probes

(2010) Se-Jin Oh et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Plasmas for spacecraft propulsion

(2009) C Charles   JOURNAL OF PHYSICS D-APPLIED PHYSICS