Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

Published 2014 View Full Article

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Title
Control of electron energy distribution by adding a pulse inductive field in capacitive discharge
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 23, Issue 6, Pages 062002
Publisher
IOP Publishing
Online
2014-09-08
DOI
10.1088/0963-0252/23/6/062002

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