H+ ion-induced damage and etching of multilayer graphene in H2 plasmas
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Title
H+ ion-induced damage and etching of multilayer graphene in H2 plasmas
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 13, Pages 133301
Publisher
AIP Publishing
Online
2017-04-07
DOI
10.1063/1.4979023
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