Patterning of highly oriented pyrolytic graphite and glassy carbon surfaces by nanolithography and oxygen plasma etching

Published 2009 View Full Article

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Title
Patterning of highly oriented pyrolytic graphite and glassy carbon surfaces by nanolithography and oxygen plasma etching
Authors
Keywords
-
Journal
CARBON
Volume 47, Issue 5, Pages 1335-1342
Publisher
Elsevier BV
Online
2009-01-23
DOI
10.1016/j.carbon.2009.01.018

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