XPS investigations of graphene surface cleaning using H2- and Cl2-based inductively coupled plasma

Title
XPS investigations of graphene surface cleaning using H2- and Cl2-based inductively coupled plasma
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 48, Issue 7, Pages 451-455
Publisher
Wiley
Online
2016-04-04
DOI
10.1002/sia.6010

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