XPS investigations of graphene surface cleaning using H2- and Cl2-based inductively coupled plasma
Published 2016 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
XPS investigations of graphene surface cleaning using H2- and Cl2-based inductively coupled plasma
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 48, Issue 7, Pages 451-455
Publisher
Wiley
Online
2016-04-04
DOI
10.1002/sia.6010
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- X-Ray Spectroscopic Investigation of Chlorinated Graphene: Surface Structure and Electronic Effects
- (2015) Xu Zhang et al. ADVANCED FUNCTIONAL MATERIALS
- Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
- (2015) G. Cunge et al. JOURNAL OF APPLIED PHYSICS
- Dry-cleaning of graphene
- (2014) Gerardo Algara-Siller et al. APPLIED PHYSICS LETTERS
- The influence of thermal annealing to remove polymeric residue on the electronic doping and morphological characteristics of graphene
- (2013) Kitu Kumar et al. CARBON
- Elementary processes of H2 plasma-graphene interaction: A combined molecular dynamics and density functional theory study
- (2013) E. Despiau-Pujo et al. JOURNAL OF APPLIED PHYSICS
- Rapid Selective Etching of PMMA Residues from Transferred Graphene by Carbon Dioxide
- (2013) Cheng Gong et al. Journal of Physical Chemistry C
- Dry etching techniques for active devices based on hexagonal boron nitride epilayers
- (2013) Samuel Grenadier et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Graphene transfer with reduced residue
- (2013) Michael Her et al. PHYSICS LETTERS A
- Si-Compatible Cleaning Process for Graphene Using Low-Density Inductively Coupled Plasma
- (2012) Yeong-Dae Lim et al. ACS Nano
- Mechanical cleaning of graphene
- (2012) A. M. Goossens et al. APPLIED PHYSICS LETTERS
- Functionalisation of graphene surfaces with downstream plasma treatments
- (2012) Niall McEvoy et al. CARBON
- Toward Clean and Crackless Transfer of Graphene
- (2011) Xuelei Liang et al. ACS Nano
- The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2
- (2011) A. Pirkle et al. APPLIED PHYSICS LETTERS
- The effect of downstream plasma treatments on graphene surfaces
- (2011) Nikolaos Peltekis et al. CARBON
- Graphene Annealing: How Clean Can It Be?
- (2011) Yung-Chang Lin et al. NANO LETTERS
- Imaging and Spectroscopy of Multiwalled Carbon Nanotubes during Oxidation: Defects and Oxygen Bonding
- (2009) Alexei Barinov et al. ADVANCED MATERIALS
- Transfer of graphene layers grown on SiC wafers to other substrates and their integration into field effect transistors
- (2009) Sakulsuk Unarunotai et al. APPLIED PHYSICS LETTERS
- Applications of high lateral and energy resolution imaging XPS with a double hemispherical analyser based spectromicroscope
- (2009) M. Escher et al. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
- The electronic properties of graphene
- (2009) A. H. Castro Neto et al. REVIEWS OF MODERN PHYSICS
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started