Effect of Cl2 plasma treatment and annealing on vanadium based metal contacts to Si-doped Al0.75Ga0.25N

Title
Effect of Cl2 plasma treatment and annealing on vanadium based metal contacts to Si-doped Al0.75Ga0.25N
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 12, Pages 125701
Publisher
AIP Publishing
Online
2017-09-25
DOI
10.1063/1.4993447

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