Effects of thermal annealing on structural and electrical properties of surface-activated n-GaSb/n-GaInP direct wafer bonds

Title
Effects of thermal annealing on structural and electrical properties of surface-activated n-GaSb/n-GaInP direct wafer bonds
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 13, Pages 135307
Publisher
AIP Publishing
Online
2017-10-05
DOI
10.1063/1.5002080

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