A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection

Published 2017 View Full Article

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Title
A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 64, Issue 5, Pages 3940-3949
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-01-11
DOI
10.1109/tie.2017.2650861

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