A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection

标题
A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection
作者
关键词
-
出版物
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 64, Issue 5, Pages 3940-3949
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2017-01-11
DOI
10.1109/tie.2017.2650861

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