Electron-beam lithography for polymer bioMEMS with submicron features
Published 2016 View Full Article
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Title
Electron-beam lithography for polymer bioMEMS with submicron features
Authors
Keywords
-
Journal
Microsystems & Nanoengineering
Volume 2, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-11-07
DOI
10.1038/micronano.2016.53
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