Polymers in conventional and alternative lithography for the fabrication of nanostructures

Title
Polymers in conventional and alternative lithography for the fabrication of nanostructures
Authors
Keywords
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Journal
EUROPEAN POLYMER JOURNAL
Volume 47, Issue 11, Pages 2033-2052
Publisher
Elsevier BV
Online
2011-08-21
DOI
10.1016/j.eurpolymj.2011.07.025

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