Thermal Stability of Implanted or Plasma Exposed Deuterium in Single Crystal Ga2O3

Title
Thermal Stability of Implanted or Plasma Exposed Deuterium in Single Crystal Ga2O3
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 6, Issue 2, Pages Q3026-Q3029
Publisher
The Electrochemical Society
Online
2016-09-25
DOI
10.1149/2.0051702jss

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