Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures
出版年份 2016 全文链接
标题
Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures
作者
关键词
-
出版物
MRS Communications
Volume 6, Issue 01, Pages 17-22
出版商
Cambridge University Press (CUP)
发表日期
2016-02-16
DOI
10.1557/mrc.2016.3
参考文献
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