A normally-closed piezoelectric micro-valve with flexible stopper

A novel linear piezoelectric actuator with two working principles of standing and traveling wave vibration mode

(2015) Songmei Yuan et al.   AIP Advances

Compact, power-efficient architectures using microvalves and microsensors, for intrathecal, insulin, and other drug delivery systems

(2012) Tao Li et al.   ADVANCED DRUG DELIVERY REVIEWS

Advanced materials and processing for drug delivery: The past and the future

(2012) Ying Zhang et al.   ADVANCED DRUG DELIVERY REVIEWS

A solid hydraulically amplified piezoelectric microvalve

(2011) Xiaosong Wu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Dynamic Characteristics of a Hydraulic Amplification Mechanism for Large Displacement Actuators Systems

(2010) Xavier Arouette et al.   SENSORS

A low power, microvalve regulated architecture for drug delivery systems

(2009) Allan Thomas Evans et al.   BIOMEDICAL MICRODEVICES

MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

(2009) T. Ninomiya et al.   SENSORS AND ACTUATORS A-PHYSICAL

Piezoelectric unimorph valve assembled on an LTCC substrate

(2008) M. Sobocinski et al.   SENSORS AND ACTUATORS A-PHYSICAL