MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

Published 2009 View Full Article

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Title
MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 166, Issue 2, Pages 277-282
Publisher
Elsevier BV
Online
2009-07-15
DOI
10.1016/j.sna.2009.07.002

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