A solid hydraulically amplified piezoelectric microvalve

Published 2011 View Full Article

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Title
A solid hydraulically amplified piezoelectric microvalve
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 9, Pages 095003
Publisher
IOP Publishing
Online
2011-07-28
DOI
10.1088/0960-1317/21/9/095003

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