Design criteria for XeF2 enabled deterministic transformation of bulk silicon (100) into flexible silicon layer

Title
Design criteria for XeF2 enabled deterministic transformation of bulk silicon (100) into flexible silicon layer
Authors
Keywords
-
Journal
AIP Advances
Volume 6, Issue 7, Pages 075010
Publisher
AIP Publishing
Online
2016-07-16
DOI
10.1063/1.4959193

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