Design criteria for XeF2 enabled deterministic transformation of bulk silicon (100) into flexible silicon layer
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Title
Design criteria for XeF2 enabled deterministic transformation of bulk silicon (100) into flexible silicon layer
Authors
Keywords
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Journal
AIP Advances
Volume 6, Issue 7, Pages 075010
Publisher
AIP Publishing
Online
2016-07-16
DOI
10.1063/1.4959193
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