High performance high-κ/metal gate complementary metal oxide semiconductor circuit element on flexible silicon

Title
High performance high-κ/metal gate complementary metal oxide semiconductor circuit element on flexible silicon
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 108, Issue 9, Pages 094102
Publisher
AIP Publishing
Online
2016-03-01
DOI
10.1063/1.4943020

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