Microprofile formation by thermal oxidation of molybdenum films

Authors

Keywords

Technical Physic Letter, Thermal Oxidation, High Refractive Index, Molybdenum Oxide, Diffractive Optical Element

Journal

TECHNICAL PHYSICS LETTERS

Volume 42, Issue 2, Pages 164-166

Publisher

Pleiades Publishing Ltd

Online

2016-04-04

DOI

10.1134/s1063785016020085

References

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