Zigzag structures obtained by anisotropic etching of macroporous silicon

Title
Zigzag structures obtained by anisotropic etching of macroporous silicon
Authors
Keywords
Porous Silicon, Technical Physic Letter, Crystallographic Axis, Rear Side, Anisotropic Etching
Journal
TECHNICAL PHYSICS LETTERS
Volume 39, Issue 11, Pages 990-993
Publisher
Pleiades Publishing Ltd
Online
2013-12-09
DOI
10.1134/s1063785013110175

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