Microprofile formation by thermal oxidation of molybdenum films

标题

作者

关键词

Technical Physic Letter, Thermal Oxidation, High Refractive Index, Molybdenum Oxide, Diffractive Optical Element

出版物

Volume 42, Issue 2, Pages 164-166

出版商

Pleiades Publishing Ltd

发表日期

2016-04-04

DOI

10.1134/s1063785016020085

参考文献

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