Dry etching techniques for active devices based on hexagonal boron nitride epilayers

Dielectric strength, optical absorption, and deep ultraviolet detectors of hexagonal boron nitride epilayers

(2012) J. Li et al.   APPLIED PHYSICS LETTERS

Epitaxial growth and demonstration of hexagonal BN/AlGaN p-n junctions for deep ultraviolet photonics

(2012) S. Majety et al.   APPLIED PHYSICS LETTERS

Band-edge transitions in hexagonal boron nitride epilayers

(2012) S. Majety et al.   APPLIED PHYSICS LETTERS

Origin of the significantly enhanced optical transitions in layered boron nitride

(2012) Bing Huang et al.   PHYSICAL REVIEW B

Epitaxially grown semiconducting hexagonal boron nitride as a deep ultraviolet photonic material

(2011) R. Dahal et al.   APPLIED PHYSICS LETTERS

Fabrication of sloped sidewalls by inductively coupled plasma etching for silicon micro-optic structures

(2011) Andrew Sarangan   Journal of Micro-Nanolithography MEMS and MOEMS

Hexagonal boron nitride epitaxial layers as neutron detector materials

(2011) J. Li et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Hunting for Monolayer Boron Nitride: Optical and Raman Signatures

(2011) Roman V. Gorbachev et al.   Small

Etching of 10Boron with SF6-based Electron Cyclotron Resonance Plasmas for Pillar-Structured Thermal Neutron Detectors

(2010) L. F. Voss et al.   JOURNAL OF ELECTRONIC MATERIALS

Far-ultraviolet plane-emission handheld device based on hexagonal boron nitride

(2009) Kenji Watanabe et al.   Nature Photonics

Comparison of CF4 and SF6 based plasmas for ECR etching of isotopically enriched 10boron films

(2009) L.F. Voss et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Atomically thin hexagonal boron nitride probed by ultrahigh-resolution transmission electron microscopy

(2009) Nasim Alem et al.   PHYSICAL REVIEW B

Dry etching of AlN films using the plasma generated by fluoride

(2008) Da Chen et al.   VACUUM