Article
Engineering, Electrical & Electronic
Hyeok Jae Lee, Jin Ha Hwang, Ji-Yong Park, Sang Woon Lee
Summary: This study introduces a novel ALD method to decrease the resistivity of TiN films by introducing H2S and utilizing a series of reaction pathways, leading to a significant reduction in resistivity compared to the conventional TiCl4 + NH3 ALD process. The proposed method reduces Cl impurities and improves the performance of TiN films for semiconductor device applications, offering potential benefits for high-density integration in DRAM capacitors.
ACS APPLIED ELECTRONIC MATERIALS
(2021)
Article
Materials Science, Multidisciplinary
Seokhwi Song, Chanwon Jung, Jisoo Kim, Younsoo Kim, Hanjin Lim, Hyeongtag Jeon
Summary: This study investigates the deposition of ZrO2 using plasma-enhanced atomic layer deposition (PEALD) with a CpZr(NMe2)(3) precursor. The bonding and electrical properties of ZrO2 thin films are studied by varying the deposition temperature and plasma power. The results show that the deposition temperature and plasma power strongly influence the crystallinity of the films, and the highest dielectric constant is achieved at 50 W and 300 degrees C.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
(2023)
Article
Chemistry, Physical
Lisanne Demelius, Matthias Blatnik, Katrin Unger, Paola Parlanti, Mauro Gemmi, Anna Maria Coclite
Summary: Interest in atomic layer deposition (ALD) processes on polymer substrates is driven by the growth of organic electronics and polymer-based nanodevices. This study investigates the initial growth and interface formation during plasma-enhanced ALD (PE-ALD) of ZnO on poly ethylene glycol dimethylacrylate (pEGDMA) and poly 2-hydroxyethyl methacrylate (pHEMA) thin films. The findings reveal that PE-ALD growth on polymers is influenced by both polymer etching and ZnO nucleation and growth, providing valuable insights for the development of new processes and applications.
APPLIED SURFACE SCIENCE
(2022)
Article
Nanoscience & Nanotechnology
Felix Blendinger, Daniel Seitz, Andreas Ottenschlager, Monika Fleischer, Volker Bucher
Summary: TiO2 thin films deposited on PEEK using PEALD method show promising osteogenic properties, enhancing the bioactivity of the implants effectively.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Materials Science, Ceramics
Seung Won Lee, Min Ji Jeong, Youkyoung Oh, Hyo-Bae Kim, Tae-Eon Park, Ji-Hoon Ahn
Summary: In this study, the effect of Al doping in HfZrO2 thin films was investigated. It was found that Al doping can modulate the crystal structure, improve the dielectric constant, and decrease the leakage current density. Furthermore, the Al-doped HfZrO2 thin film exhibited excellent energy storage properties, making it a potential candidate for next-generation charge storage devices.
CERAMICS INTERNATIONAL
(2023)
Article
Chemistry, Multidisciplinary
Keun Yong Lim, Hong Hee Kim, Ji Hyun Noh, So Hyun Tak, Jae-Woong Yu, Won Kook Choi
Summary: A triple-layered structure of a-SiNx:H/SiOxNy/hybrid SiOx (ASH) thin film encapsulation (TFE) method was performed on QD-LEDs using reproducible PECVD and dip-coating processes. The ASH films exhibited high transmittance and low water vapor transmission rate. The ASH films also demonstrated comparable performance to glass lid encapsulation in extending the lifetime of QD-LEDs.
Article
Materials Science, Multidisciplinary
Tim Hasselmann, Bujamin Misimi, Nils Boysen, David Zanders, Jan-Lucas Wree, Detlef Rogalla, Tobias Haeger, Florian Zimmermann, Kai Oliver Brinkmann, Sebastian Schaedler, Detlef Theirich, Ralf Heiderhoff, Anjana Devi, Thomas Riedl
Summary: In this study, highly conductive silver films were successfully grown at low temperatures using plasma-enhanced spatial ALD with a newly introduced nitrogen-based silver precursor. These silver films, used as bottom electrodes in organic solar cells, showed comparable performance to those made by traditional high-temperature vacuum processes.
ADVANCED MATERIALS TECHNOLOGIES
(2023)
Article
Engineering, Electrical & Electronic
Hae Lin Yang, Tae-Yeon Kim, Gi-Beom Park, Ara Yoon, Ki-cheol Song, Yeonhee Lee, Jongryul Park, Taehyeong Kang, Yongjoo Park, Jin-Seong Park
Summary: SiOxNy films were deposited at low temperatures (100-300°C) using a tetraisocyanate silane precursor and N2 plasma. By using tetraisocyanate silane, SiOxNy films with lower hydrogen content and Si-N-O bonds were obtained. Increasing the deposition temperature resulted in stronger Si-N bonds, higher dielectric constant, and lower leakage current density. The presence of hydrogen impurities in the SiOxNy film was reduced, leading to a decrease in hysteresis with increasing temperature.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Materials Science, Multidisciplinary
Pi-Chun Juan, Kuei-Chih Lin, Wen-Hao Cho, Chi-Chung Kei, Wei-Hsuan Hung, Hao-Pin Shi
Summary: Molybdenum oxide thin films were synthesized using plasma-enhanced atomic layer deposition, and the effect of plasma power on film structure was investigated. The film structure changed from orthorhombic phase to metastable monoclinic phase as the plasma power increased. Different grain morphologies were observed at different power levels, and the interfacial layer thickness was thinner at low powers. X-ray diffraction confirmed the presence of only +6 oxidation state of Mo in the films.
MATERIALS CHEMISTRY AND PHYSICS
(2022)
Article
Physics, Applied
M. Jullien, C. S. Chang, L. Badie, S. Robert, M. Hehn, D. Lacour, F. Montaigne
Summary: Cobalt thin films were grown using plasma-enhanced atomic layer deposition, with investigations into their electrical and magnetic properties as a function of growth temperature. It was found that the magnetic and resistivity properties of the films varied with growth temperature, with an optimal growth temperature of 340 degrees C. The study suggests that atomic layer deposition may be a viable alternative for depositing ferromagnetic layers in spintronics applications.
JOURNAL OF PHYSICS D-APPLIED PHYSICS
(2021)
Article
Materials Science, Ceramics
Dohyun Go, Jaehyeong Lee, Jeong Woo Shin, Sungje Lee, Wangu Kang, Jeong Hwan Han, Jihwan An
Summary: This study demonstrates a method to achieve localized crystallization of TiO2 thin films through plasma treatment, and modulates the optical and electrical properties by fabricating phase-gradient TiO2 films, optimizing the ratio between amorphous and crystalline layer thicknesses.
CERAMICS INTERNATIONAL
(2021)
Article
Chemistry, Multidisciplinary
Yue Yang, Xiao-Ying Zhang, Chen Wang, Fang-Bin Ren, Run-Feng Zhu, Chia-Hsun Hsu, Wan-Yu Wu, Dong-Sing Wuu, Peng Gao, Yu-Jiao Ruan, Shui-Yang Lien, Wen-Zhang Zhu
Summary: Amorphous gallium oxide thin films were grown using plasma-enhanced atomic layer deposition. The films exhibited decreasing band gap energy and increased density as the temperature increased. The higher substrate temperature also resulted in increased surface roughness. Films grown at temperatures below 200 degrees C were amorphous, while the film grown at 250 degrees C showed slight crystallinity.
Article
Nanoscience & Nanotechnology
Su Min Hwang, Harrison Sejoon Kim, Dan N. Le, Arul Vigneswar Ravichandran, Akshay Sahota, Jaebeom Lee, Yong Chan Jung, Si Joon Kim, Jinho Ahn, Byung Keun Hwang, Lance Lee, Xiaobing Zhou, Jiyoung Kim
Summary: This study investigated the deposition of SiNx films using 1,1,1-trichlorodisilane (3CDS) precursor, showing higher growth per cycle and improved wet etch rates compared to hexachlorodisilane (HCDS) and pentachlorodisilane (PCDS). The unique structural characteristics of 3CDS, with three chlorine and three hydrogen atoms localized on each silicon atom, contributed to the superior film properties observed. SiNx films deposited with 3CDS demonstrated high conformality and etch resistance on both planar and patterned surfaces.
ACS APPLIED NANO MATERIALS
(2021)
Article
Chemistry, Multidisciplinary
Emanuela Schiliro, Filippo Giannazzo, Salvatore Di Franco, Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte, Pawel Prystawko, Piotr Kruszewski, Mike Leszczynski, Ildiko Cora, Bela Pecz, Zsolt Fogarassy, Raffaella Lo Nigro
Summary: In this study, ultra-thin aluminum nitride (AlN) films with a thickness of 5 nm were successfully prepared using plasma enhanced atomic layer deposition (PE-ALD) on gallium nitride (GaN) substrates, and their structural, chemical, and electrical properties were investigated. The formation of a sharp epitaxial interface between AlN and GaN resulted in the creation of a two-dimensional electron gas (2DEG), with excellent current transport properties demonstrated through various analysis techniques. The electron transport through the AlN film followed the Fowler-Nordheim tunneling mechanism, with an average barrier height in good agreement with the expected AlN/GaN conduction band offset.
Article
Materials Science, Ceramics
Jaemin Kim, Jinsu Park, Duy Phong Pham, Myung Soo Yeo, HwaSung Rhee, Youg-Sang Kim, Eun-Chel Cho, Junsin Yi
Summary: The characteristics of HfO2 thin films with and without UV exposure post-treatment were discussed in this study. The results showed that the post-treated HfO2 films had higher crystallinity, lower suboxide bond proportion, higher dielectric constant, and improved device capacitance compared to the untreated films. The proposed post-treatment process has the significant potential in enhancing the quality of HfO2 thin films for semiconductor devices.
CERAMICS INTERNATIONAL
(2021)
Article
Nanoscience & Nanotechnology
Yongmin Kim, J. Provine, Stephen P. Waich, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindier, Kihyun Kim, Fritz B. Prinz
ACS APPLIED MATERIALS & INTERFACES
(2016)
Article
Materials Science, Multidisciplinary
Yongmin Kim, Peter Schindler, Anup L. Dadlani, Shinjita Acharya, J. Provine, Jihwan An, Fritz B. Prinz
Article
Chemistry, Physical
Shicheng Xu, Anup L. Dadlani, Shinjita Acharya, Peter Schindler, Fritz B. Prinz
APPLIED SURFACE SCIENCE
(2016)
Article
Chemistry, Physical
Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J. Provine, Fritz B. Prinz
JOURNAL OF PHYSICAL CHEMISTRY C
(2016)
Article
Materials Science, Coatings & Films
J. Provine, Peter Schindler, Jan Torgersen, Hyo Jin Kim, Hans-Peter Karnthaler, Fritz B. Prinz
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2016)
Article
Nanoscience & Nanotechnology
J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, Fritz B. Prinz
Article
Materials Science, Multidisciplinary
Shinjita Acharya, Jan Torgersen, Yongmin Kim, Joonsuk Park, Peter Schindler, Anup L. Dadlani, Martin Winterkorn, Shicheng Xu, Stephen P. Walch, Takane Usui, Christian Schildknecht, Fritz B. Prinz
JOURNAL OF MATERIALS CHEMISTRY C
(2016)
Article
Nanoscience & Nanotechnology
Hyo Jin K. Kim, Kirsten E. Kaplan, Peter Schindler, Shicheng Xu, Martin M. Winterkorn, David B. Heinz, Timothy S. English, J. Provine, Fritz B. Prinz, Thomas W. Kenny
ACS APPLIED MATERIALS & INTERFACES
(2019)
Article
Chemistry, Physical
Peter Schindler, Daniel C. Riley, Igor Bargatin, Kunal Sahasrahuddhe, Jared W. Schwede, Steven Sun, Piero Pianetta, Zhi-Xun Shen, Roger T. Howe, Nicholas A. Melosh
ACS ENERGY LETTERS
(2019)
Article
Chemistry, Multidisciplinary
Shicheng Xu, Zhaoxuan Wang, Sam Dull, Yunzhi Liu, Dong Un Lee, Juan S. Lezama Pacheco, Marat Orazov, Per Erik Vullum, Anup Lal Dadlani, Olga Vinogradova, Peter Schindler, Qizhan Tam, Thomas D. Schladt, Jonathan E. Mueller, Sebastian Kirsch, Gerold Huebner, Drew Higgins, Jan Torgersen, Venkatasubramanian Viswanathan, Thomas Francisco Jaramillo, Fritz B. Prinz
Summary: Lattice-strained platinum catalysts achieved by removing a soluble core from a platinum shell synthesized via atomic layer deposition exhibit remarkable catalytic performance for the oxygen reduction reaction (ORR). Further optimization of nanoparticle geometry and ionomer/carbon interactions enable high mass activity in membrane electrode assembly. However, attention should be directed towards improving high performance in the high-current-density region for high-power-density hydrogen fuel cells.
ADVANCED MATERIALS
(2021)
Article
Chemistry, Multidisciplinary
Evan R. Antoniuk, Peter Schindler, W. Andreas Schroeder, Bruce Dunham, Piero Pianetta, Theodore Vecchione, Evan J. Reed
Summary: Through data-driven screening, a diverse list of high brightness photocathode materials has been discovered, providing statistically meaningful insights into their properties. Additionally, a family of M2O photocathode materials has been identified through multiobjective screening, showing superior photoemission properties and air stability.
ADVANCED MATERIALS
(2021)
Article
Chemistry, Physical
Yongmin Kim, Shicheng Xu, Joonsuk Park, Anup Lal Dadlani, Olga Vinogradova, Dilip Krishnamurthy, Marat Orazov, Dong Un Lee, Sam Dull, Peter Schindler, Hyun Soo Han, Zhaoxuan Wang, Tanja Graf, Thomas D. Schladt, Jonathan E. Mueller, Ritimukta Sarangi, Ryan Davis, Venkatasubramanian Viswanathan, Thomas Francisco Jaramillo, Drew C. Higgins, Fritz B. Prinz
Summary: The study developed Pt3Ti electrocatalysts using atomic layer deposition and thermal reductive annealing, which exhibited high activity and stability in the oxygen reduction reaction. Experimental and computational results showed that Pt enrichment on the Pt3Ti enhanced activity, while the intrinsic stability of the Pt3Ti phase provided durability, surpassing the performance of other PtTi catalysts reported to date.
APPLIED CATALYSIS B-ENVIRONMENTAL
(2022)
Article
Materials Science, Multidisciplinary
Evan R. Antoniuk, Yumeng Yue, Yao Zhou, Peter Schindler, W. Andreas Schroeder, Bruce Dunham, Piero Pianetta, Theodore Vecchione, Evan J. Reed
Article
Chemistry, Physical
Shicheng Xu, Yongmin Kim, Joonsuk Park, Drew Higgins, Shih-Jia Shen, Peter Schindler, Dickson Thian, J. Provine, Jan Torgersen, Tanja Graf, Thomas D. Schladt, Marat Orazov, Bernard Haochih Liu, Thomas F. Jaramillo, Fritz B. Prinz
Article
Nanoscience & Nanotechnology
Jie Zhang, Xiaoyang Chen, MingJian Ding, Jiaqiang Chen, Ping Yu
Summary: This study enhances the compositional inhomogeneity of relaxor ferroelectric thin films to improve their dielectric temperature stability. The prepared films exhibit a relatively high dielectric constant and a very low variation ratio of dielectric constant over a wide temperature range.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Xiaoyu Chen, Ranran Zhang, Hao Zou, Ling Li, Qiancheng Zhu, Wenming Zhang
Summary: Polyaniline-manganese dioxide composites exhibit high conductivity, long discharge platform, and stable circulation, and the specific capacity is increased by providing additional H+ ions to participate in the reaction.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Xutao Huang, Yinping Chen, Jianjun Wang, Gang Lu, Wenxin Wang, Zan Yao, Sixin Zhao, Yujie Liu, Qian Li
Summary: This study aims to establish a novel approach to better understand and predict the behavior of materials with multi-scale lamellar microstructures. High-resolution reconstruction and collaborative characterization methods are used to accurately represent the microstructure. The mechanical properties of pearlite are investigated using crystal plasticity simulation and in-situ scanning electron microscopy tensile testing. The results validate the reliability of the novel strategy.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Cheng Chen, Fanchao Meng, Jun Song
Summary: This study systematically investigated the unfaulting mechanism of single-layer interstitial dislocation loops in irradiated L12-Ni3Al. The unfaulting routes of the loops were uncovered and the symmetry breaking during the unfaulting processes was further elucidated. A continuum model was formulated to analyze the energetics of the loops and predict the unfaulting threshold.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Darshan Bamney, Laurent Capolungo
Summary: This work investigates the formation of adjoining twin pairs (ATPs) at grain boundaries (GBs) in hexagonal close-packed (hcp) metals, focusing on the co-nucleation (CN) of pairs of deformation twins. A continuum defect mechanics model is proposed to study the energetic feasibility of CN of ATPs resulting from GB dislocation dissociation. The model reveals that CN is preferred over the nucleation of a single twin variant for low misorientation angle GBs. Further analysis considering GB character and twin system alignment suggests that CN events could be responsible for ATP formation even at low m' values.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Bing Han, Zhengqian Fu, Guoxiang Zhao, Xuefeng Chen, Genshui Wang, Fangfang Xu
Summary: This study investigates the behavior of electric-field induced antiferroelectric to ferroelectric (AFE-FE) phase transition and reveals the evolution of atomic displacement ordering as the cause for the transition behavior changing from sharp to diffuse. The novel semi-ordered configuration results from the competing interaction between long-range displacement modulation and compositional inhomogeneity, which leads to a diffuse AFE-FE transition while maintaining the switching field.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Akib Jabed, Golden Kumar
Summary: This study demonstrates that cryogenic rejuvenation promotes homogeneous-like flow and increases ductility in metallic glass samples. Conversely, annealing has the opposite effect, resulting in a smoother fracture surface.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Xin Ji, Yan Chong, Satoshi Emura, Koichi Tsuchiya
Summary: A heterogeneous microstructure in Ti-15Mo-3Al alloy with heterogeneous distributions of Mo element and omega(iso) precipitates has achieved a four-fold increase in tensile ductility without a loss of tensile strength, by blocking the propagation of dislocation channels and preventing the formation of micro-cracks.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Amit Samanta, Prasanna Balaprakash, Sylvie Aubry, Brian K. Lin
Summary: This study proposes a combined large-scale first principles approach with machine learning and materials informatics to quickly explore the chemistry-composition space of advanced high strength steels (AHSS). The distribution of aluminum and manganese atoms in iron is systematically explored using first principles calculations to investigate low stacking fault energy configurations. The use of an automated machine learning tool, DeepHyper, speeds up the computational process. The study provides insights into the distribution of aluminum and manganese atoms in systems containing stacking faults and their effects on the equilibrium distribution.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Guowei Zhou, Yuanzhe Hu, Zizheng Cao, Myoung Gyu Lee, Dayong Li
Summary: In this work, a physics-constrained neural network is used to predict grain-level responses in FCC material by incorporating crystal plasticity theory. The key feature, shear strain rate of slip system, is identified based on crystal plasticity and incorporated into the loss function as physical constitutive equations. The introduction of physics constraints accelerates the convergence of the neural network model and improves prediction accuracy, especially for small-scale datasets. Transfer learning is performed to capture complex in-plane deformation of crystals with any initial orientations, including cyclic loading and arbitrary non-monotonic loading.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Pengfei Yang, Qichang Li, Zhongying Wang, Yuxiao Gao, Wei Jin, Weiping Xiao, Lei Wang, Fusheng Liu, Zexing Wu
Summary: In this study, the HER performance of Ru-based catalysts is significantly improved through the dual-doping strategy. The obtained catalyst exhibits excellent performance in alkaline freshwater and alkaline seawater, and can be stably operated in a self-assembled overall water splitting electrolyzer.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Ilias Bikmukhametov, Garritt J. Tucker, Gregory B. Thompson
Summary: Depositing a Ni-1at. % P film can facilitate the formation of multiple quintuple twin junctions, resulting in a five-fold twin structure and a pentagonal pyramid surface topology. The ability to control material structures offers opportunities for creating novel surface topologies, which can be used as arrays of field emitters or textured surfaces.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Zening Yang, Weiwei Sun, Zhengyu Sun, Mutian Zhang, Jin Yu, Yubin Wen
Summary: Multicomponent oxides (MCOs) have wide applications and accurately predicting their thermal expansion remains challenging. This study introduces an innovative attention-based deep learning model, which achieves improved performance by using two self-attention modules and demonstrates adaptability and interpretability.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Ze Liu, Cai Chen, Yuanxun Zhou, Lanting Zhang, Hong Wang
Summary: This study attempts to address the gap in cooling rates between thin film deposition and bulk metallic glass (BMG) casting by correlating the glass-forming range (GFR) determined from combinatorial materials chips (CMCs) with the glass-forming ability (GFA) of BMG. The results show that the full-width at half maximum (FWHM) of the first sharp diffraction peak (FSDP) is a good indicator of BMG GFA, and strong positive correlations between FWHM and the critical casting diameter (Dmax) are observed in various BMG systems. Furthermore, the Pearson correlation coefficients suggest possible similarities in the GFA natures of certain BMG pairs.
SCRIPTA MATERIALIA
(2024)
Article
Nanoscience & Nanotechnology
Mike Schneider, Jean-Philippe Couzinie, Amin Shalabi, Farhad Ibrahimkhel, Alberto Ferrari, Fritz Koermann, Guillaume Laplanche
Summary: This work aims to predict the microstructure of recrystallized medium and high-entropy alloys, particularly the density and thickness of annealing twins. Through experiments and simulations, a database is provided for twin boundary engineering in alloy development. The results also support existing theories and empirical relationships.
SCRIPTA MATERIALIA
(2024)
