Low leakage stoichiometric SrTiO3dielectric for advanced metal-insulator-metal capacitors

Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor

(2015) Woongkyu Lee et al.   CHEMISTRY OF MATERIALS

A novel technique exploiting C–V, G–V and I–V simulations to investigate defect distribution and native oxide in high-κ dielectrics for III–V MOSFETs

(2015) G. Sereni et al.   MICROELECTRONIC ENGINEERING

Understanding the EOT–Jg degradation in Ru/SrTiOx/Ru metal–insulator–metal capacitors formed with Ru atomic layer deposition

(2015) M. Popovici et al.   MICROELECTRONIC ENGINEERING

Reducing the nano-scale defect formation of atomic-layer-deposited SrTiO 3 films by adjusting the cooling rate of the crystallization annealing of the seed layer

(2015) Woongkyu Lee et al.   THIN SOLID FILMS

Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory

(2014) M. Popovici et al.   APPLIED PHYSICS LETTERS

Leakage Control in 0.4-nm EOT Ru/SrTiOx/Ru Metal-Insulator-Metal Capacitors: Process Implications

(2014) Johan Swerts et al.   IEEE ELECTRON DEVICE LETTERS

Direct View at Excess Electrons inTiO2Rutile and Anatase

(2014) Martin Setvin et al.   PHYSICAL REVIEW LETTERS

Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal–Insulator–Metal Capacitors

(2013) Woongkyu Lee et al.   CHEMISTRY OF MATERIALS

Crystallization Study by Transmission Electron Microscopy of SrTiO3Thin Films Prepared by Plasma-Assisted ALD

(2013) V. Longo et al.   ECS Journal of Solid State Science and Technology

Controlling the initial growth behavior of SrTiO3 films by interposing Al2O3 layers between the film and the Ru substrate

(2012) Woongkyu Lee et al.   JOURNAL OF MATERIALS CHEMISTRY

Intrinsic Nature of the Excess Electron Distribution at theTiO2(110)Surface

(2012) P. Krüger et al.   PHYSICAL REVIEW LETTERS

SrTiO3 thin film capacitors on silicon substrates with insignificant interfacial passive layers

(2010) S. Schmelzer et al.   APPLIED PHYSICS LETTERS

Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

(2009) N. Menou et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

(2009) M. Popovici et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers

(2009) D. Manger et al.   MICROELECTRONIC ENGINEERING

Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications

(2008) Sang Woon Lee et al.   APPLIED PHYSICS LETTERS

Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O

(2008) Sang Woon Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY