Modularized batch production of 12-inch transition metal dichalcogenides by local element supply

Title
Modularized batch production of 12-inch transition metal dichalcogenides by local element supply
Authors
Keywords
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Journal
Science Bulletin
Volume 68, Issue 14, Pages 1514-1521
Publisher
Elsevier BV
Online
2023-07-04
DOI
10.1016/j.scib.2023.06.037

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