Fabrication of two-gimbal Ni–Fe torsional micro-gyroscope by SU-8 based UV-LIGA process

Published 2014 View Full Article

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Title
Fabrication of two-gimbal Ni–Fe torsional micro-gyroscope by SU-8 based UV-LIGA process
Authors
Keywords
Residual Stress, Laser Doppler Vibrometer, Electrostatic Actuation, Torsional Beam, Drive Axis
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 21, Issue 7, Pages 1479-1487
Publisher
Springer Nature
Online
2014-07-26
DOI
10.1007/s00542-014-2268-7
References
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