2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process

Published 2013 View Full Article

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Title
2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process
Authors
Keywords
Proof Mass, White Light Interferometry, Vertical Side Wall, High Aspect Ratio Structure, Multiple Exposure Technique
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 20, Issue 7, Pages 1291-1297
Publisher
Springer Nature
Online
2013-11-28
DOI
10.1007/s00542-013-1986-6

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